Ellipsodial Mirror

The Ellipsoidal reflector plays an important role in the Ultratech illuminator. It collects the light from the arc lamp and focuses it onto the light pipe. With age the ellipsoidal reflector can haze over or develop burn marks, which can cause significant loss of illumination intensity. This leads to longer exposure times that reduce throughput significantly.

Installing a new reflector can increase illumination intensity by 10% or more. Premature failure of the reflector can occur if the facility exhaust is too weak, or the exhaust damper is closed. If the bronze filters in the lamp house clog this will also reduce cooling and allow the lamp and reflector to overheat. A lamp that is overcooled will cause problems such as lamp flickering and varying exposures across the wafer. Lamp house temperature should be closely monitored to assure optimal illuminator operation. KS Equipment can provide new reflectors and bronze filters at very competitive prices. They are guaranteed to function as well as OEM parts. We can provide field service to help you with illumination intensity and uniformity problems. Call us for more information.