Reticle Air Slider Refurbishing

The reticle air slider assembly plays a critical role in your Stepper's operation. After thousands of reticle position changes, and drive ramp movements, the delicate mechanical surfaces on the reticle stage slider wear out. This wear will cause poor reticle placement during reticle loads, affecting alignment target quality, and blind step accuracy.

Calibration reticle loads with a worn reticle stage can also cause longer reticle load times. This can also affect your throughput, and during darkfield loads, cause poor operation of the drive ramps leaving the reticle placed with excessive skew, which can really impact blind step accuracy.

With todays demanding requirements for throughput, blind step, and alignment accuracy, it's a very good idea to let KS Equipment refurbish your slider to like-new operation. You will see dramatic improvements in blind step accuracy, target quality, and reticle position test accuracy, as well as, reduced reticle load times.

We test each rebuilt slider on a test stepper, and run full functionality tests.

Reticle stage sliders are delicate and expensive to buy new. You can trust KS Equipment to rebuild and return your slider to you quickly, accurately and a price you can easily justify compared to going to the OEM or other sources.