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Ultratech Model 1500 / 1700 MVS

Available Now!

Email: info@ksequipment.com
Phone: ( 831 ) 722-7173
Condition: Refurbished
Serial #: 5471

The Ultratech Stepper 1500 features:


  •  Lens- 1.0um
  •  Illumination field size 39 x 18
  •  Light pipe type-Diffuser
  •  Field size- 30 x 18
  •  MVS Type- Patmax, Series 2 bridges, Flipperless
  •  Reticle stage type- 3 x 5
  •  Computer type-PC
  •  OS Rev- 3.4
  •  Air probe type-Round
  •  Edge Switch-air probe
  •  Theta stage type- WTC
  •  Wafer chuck size, type-6" oblong, steel with frosty OAT
  •  Loader type-Automation 6"

* Machine can be configured to any wafer size and loader type




Ultratech Stepper 1700 MVS  

This machine is badged DSA, but is missing all of the DSA hardware. It is configured for flipperless MVS. Machine has new style (center bearing) theta stage and scissor exposure shutter. MFG date of 2003.


KS Equipment, Inc.
17 Hangar Way
Watsonville, CA 95076

FAX: 831-722-2038

Email: info@ksequipment.com

U1500 s1522 loader
U1500 s1522 loader
Ultratech Stepper 1500 / 1700 MVS
Ultratech Stepper 1700 MVS / DSA 1600


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