Voicecoil Theta Stage Rebuild

The UTS electronic focus system is incredibly reliable, but it is prone to occasional problems that affect overall machine performance.

• Separation of the actuator coil from the pod and loose connections for the voice coil and LVDT's can cause high focus system sigmas, and other serious focus system errors.
• Wearing of the vee-bearing surfaces can cause loss of theta adjustment precision and disengagement of the theta drive link pin. These can cause excessive z-mode drops and even wafer breakage during wafer pickup and drop off.
• Pop up chuck mechanism leaks. This critical mechanism can develop leaks, which lead to focus errors and problems during frosty reticle loads.

Being an extremely expensive assembly, the Voicecoil Theta Stage is a very good candidate for refurbishment. KS Equipment can completely rebuild the assembly, test its functionality on a 1100 or 1500 Stepper and return it to your company guaranteed to function like new, meeting or exceeding OEM specifications. Exchange units are available in many cases. Call, or email us about this valuable service.