*990 Ultratech®
Ultratech® is a leading supplier of lithography STEPPERs, Ultratech® STEPPERs are used for imaging and processing for semiconductor, advanced packaging and nanotechnology industries. KSEquipment, Inc. has a vast collection of Ultratech STEPPER parts (Click here for our PARTS LIST). Request a Quote
General Specifications for Ultratech Steppers:
KSEquipment also specializes in the following:
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Parts Beginning with... |
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Ultratech® Spare Parts List - Additional parts not mentioned may also be available,
please call +1 (831)-722-7173
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by a keyword or number click |
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On your keyboard. |
Item |
Description |
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01-xx-xxxxx |
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PMT SLIDER (400 STEP) |
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01-02-00163 |
CHUCK FOR 1000WF STD 4" |
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01-02-00258 |
FLAG POLE THETA STAGE |
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01-02-00272-001 |
REGULATOR-USED |
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01-02-00272-01 |
REGULATOR, PRESSURE (FOCUS) |
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01-02-00326 |
MASK, CROSS HOLDER, LEFT |
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01-02-00327 |
MASK HOLDER, CROSS RIGHT |
|
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MOTOR, INLAND SERVO MOTOR |
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CHUCK 3" (ALL MODELS) Custom Built |
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CHUCK 4" (ALL MODELS) |
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CHUCK 5" (ALL MODELS) |
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CHUCK 6" (ALL MODELS) |
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Custom Built Parts |
01-05-00190 |
CHUCK 8" |
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VOICE COIL THETA STAGE, ASSY (1100/1500) |
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01-05-00269 |
LAMP HOUSING, TOP ASSY (1100) |
|
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THETA STAGE INSERT |
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01-06-00021 |
SLIDER ASSY, W.A.S. ANGE |
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01-06-00061 |
AIR GAUGE ASSY (1500) ANGE |
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01-06-00072 |
CHUCK 5" |
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SHUTTER MOTOR, ASSY |
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MOTOR, RIGHT WINDOW |
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MOTOR, LEFT WINDOW |
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01-08-0061-03 |
LINK ROD (1100/1500) |
|
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THETA LINK ROD |
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01-08-00762 |
SWITCH ASSY, HOME (1100/1500) |
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01-08-00961 |
SHUTTER, EXPOSURE (PEN MOTOR ON 1500) |
|
 |
OBLONG FROSTY CHUCK |
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CHUCK 4" OBLONG MEGAFROSTY WITH SIDE BARB |
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CHUCK 5" OBLONG MEGAFROSTY WITH SIDE BARB |
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CHUCK 6" OBLONG MEGAFROSTY WITH SIDE BARB |
|
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PEN MOTOR SHUTTER DRIVER ASSY BOX |
|
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RETICLE SLIDER 1500/2700 |
|
01-08-01665 |
RETICLE FINGER ASSY, M1700 |
|
01-08-01720-04 |
OBLONG WAFER BLANK 6" D |
|
01-08-01720-SS |
CHUCK 6", OBLONG FROSTY |
|
01-08-02052 |
THETA UMBILICAL ASSY 1500 |
|
 |
01-08-02205-06 |
CHUCK, 6" ROUND MEGAFROSTY WITH SIDE BARB |
01-08-02695KS |
FLIPPER, MOTOR ASSEMBLY (1500/1700 MVS) |
01-08-03694-06 |
CHUCK 6", OBLONG MF, STAINLESS STEEL |
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01-08-04851 | BRUSH SET, SERVO MOTOR, INLAND (Former # 50-02-00334)
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FRONT FOCUS ACTUATOR ASSEMBLY, REV P |
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RIGHT FOCUS ACTUATOR ASSEMBLY, REV P |
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LEFT FOCUS ACTUATOR ASSEMBLY, REV P |
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02-xx-xxxxx |
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02-01-00035 |
SPIDER, FPI LOWER |
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02-15-02458-02 | PLATE, INSERT, BASH, 4", REV E |
03-xx-xxxxx |
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FAST PULSE CONVERTOR |
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 |
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UTS STEPPER MOTOR CONTROLLER BOARD |
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AIR GAUGE CONTROLLER |
|
03-08-00038 |
PCB, STAGE AMPLIFIER, ANGE |
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PCB, SERVO BOARD, 944 |
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BD, 944, MOTOR DRIVER, ASSY, STAGE DRIVER BOARD |
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03-08-01012-B | LOWER FLAT FIND BOARD (4-5") |
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PCB, 1500 PRISM CONTROL |
|
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PCB PHOTO PREAMP |
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STEPPER MOTOR/COOLER, TRANSITION BOARD, REV C, ASH |
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PCB, GENERAL I/O # 2 DRIVE, BREAKOUT, TRANSITION |
|
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03-15-06672 | ASSY, PCB POP-UP INTERLOCK |
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BACKPLANE, BD, UTS, POWER DRIVER, REV A |
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BRD, TRANSITION G10 # 2, DRIVE BREAKOUT |
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03-20-03996 | PCB WTC BREAKOUT ASSY |
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03-20-00166 | |
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03-20-00704 combo | PCB, |
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03-20-00760 | AIR GAUGE, REV A (UT 2000) |
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03-20-00760-AM | AIR GAUGE, REV A with Flex Manifold (UT 2000) |
 |
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SLAVE PROCESSOR, VME, FOCUS CONTROL, ASH, BD, 5
AXIS, ASSY |
|
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BOARD, DSPL, SLAVE PROCESSOR, REV A |
|
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W/VME SLAVE PROCESSOR |
|
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FOCUS CONTROL, ASH- VME SLAVE PROCESSOR |
|
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ALIGN, ASH, 5 AXIS - VME SLAVE PROCESSOR |
|
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STAGE, ASH, 5 AXIS - VME SLAVE PROCESSOR |
|
 |
03-20-00870-B | PCB, VME COMBO |
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POWER SUPPLY, SWITCHING |
|
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POWER SUPPLY, REV A. |
|
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MOTOR, STEPPER MUX PCB |
|
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PNEUMATIC, I/0, BD |
|
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SOLENOID DRIVER |
|
 |
GENERAL I/O BOARD |
|
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03-20-01124-B | PCB TRANSITION, STAGE ASH |
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PCB TRANSITION, STAGE MOTOR DRIVER |
|
 |
PCB TRANSITION, STAGE MOTOR DRIVER |
|
03-20-02032 |
TRANSITION, PWR, DISTR, 5 AXIS |
|
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SPARE MOTOR, BREAKOUT |
|
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03-20-01193-SET | MOTOR, BREAKOUT |
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PCB TRANSITION, ALIGNMENT, ASH |
|
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ALIGNMENT ANALOG |
|
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03-20-01379-A | POWER SUPPLY - UNIVERSAL MICROELECTRONICS |
 |
AIR GAUGE AMPLIFIER |
|
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PCB TRANSITION, MULTIPLEXER |
|
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PCB TRANSITION, STEPPER MOTOR, ASH |
|
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TRANSITION, STEPPER MOTOR, DRIVER |
|
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TRANSITION, SOLENOID DRIVER |
|
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TRANSITION, GENERAL I/O |
|
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SHUTTER INTERCONNECT, ASSY |
|
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LASER, DISTR, 5 AXIS |
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03-20-01939 | |
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FOCUS, BD, A/D, 5 AXIS |
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TRANSITION, FOCUS, ASH, 5 AXIS |
|
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SLAVE PROCESSOR, VME, FOCUS CONTROL, ASH, BD, 5
AXIS, ASSY |
|
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FOCUS DRIVER, 5 AXIS |
|
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PCB STAGE BREAKOUT ASSY. CABLES (05-20-02364-01,
05-20-02364-02) |
|
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03-20-02040-A | TRANSITION, FOCUS DRIVER |
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TRANSITION, FOCUS DRIVER |
|
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03-20-02211-C | BREAKOUT, GENERAL |
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PCB BREAKOUT l GENERAL I/O |
|
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03-20-02565-X | IC, PLA, PROGRAMMED, STAGE STATAS (IN X-AXIS ASH CARD/03-20-01403-10) |
 |
03-20-02567 | PMT AMP M200 |
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03-20-04940-A | 5 AXIS STAGE ASH PCB |
04-xx-xxxxx |
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ACTINIC SHUTTER MVS ILLUMINATOR, ASSY |
|
05-xx-xxxxx |
||
05-05-00389 |
SOLENOID (GATE) |
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05-06-00036-03 |
CABLE, LIMIT SWITCH W/M.S. |
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05-06-00037 |
CABLE, LIMIT SWITCH W/MICRO-SWITCH |
|
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CABLE, CRT, GROUND, REV B |
|
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CABLE, FOCUS DRIVER REV A |
|
05xx-xxxxxx |
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0502-322100 |
O-RING IDLER, 3"/4"/5" SM. LOAD |
|
0502-322400 |
IDLER PULLEY |
|
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PCB, STAGE AMPLIFIER, MOTOR #140 |
|
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PCB, STAGE AMPLIFIER, MOTOR #160 |
|
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PCB, 32 BIT INTERFACE |
|
0503-238000 |
PCB, COMPARATOR CONNECTOR |
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0503-242900 |
PCB, FAST PULSE CONVERTER |
|
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PCB, STAGE SERVO CONTROLLER |
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0503-292900 |
PCB, BINARY INTERFACE |
|
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PCB, HP COMPARATOR |
|
0503-319200 |
PCB, FOCUS CONTROL INTERFACE |
|
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AUTO PHOTO CONTROLLER |
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0503-353300 |
CONVEYER PULLEY |
|
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PCB, SHUTTER DRIVER, MODEL 200 |
|
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MOTOR DRIVER, MODEL # 311 |
|
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PNEUMATIC SENSOR, MODEL # 184 |
|
0504-202600 |
ILLUMINATOR, SERIES I, STAND. |
|
0504-286200 |
END PLATE BARREL ASSEMBLY |
|
0504-286300 |
LIGHT PIPE ASSY (900/1000S) |
|
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THETA BEARING, SHORT, ANGE |
|
0505-374900 |
MIRROR, X (990-1000WF) |
|
0505-375000 |
MIRROR, Y (990-1000WF)ANGE |
|
0506-243101 |
PMT STAGE ASSY. ANGE |
|
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MOTOR, SLOW/SYNC STEPPER 200 |
|
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DIAPHRAGM, REGULAR |
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0506-270300 |
PMT SUPPLY SOCKET |
|
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CABLE ILLUMINATOR POWER CABLE |
|
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MASK, CROSS HOLDER, LEFT |
|
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MASK HOLDER, RIGHT CROSS |
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0506-364600 |
LINK ROD (990/1000S/1000WF) |
|
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CABLE, EXT LONG, REV A |
|
0509-296501 |
PRESSURE GAUGE ASSEMBLY |
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0509-313900 |
HEIGHT GAUGE, BENCHMARKS |
|
0509-350800 |
AIR BAG FILL TOOL |
|
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SHIM KIT, SERVO MOTOR |
|
0509-485100 |
SWITCH, CHUCK VACUUM |
|
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PCB, FOCUS CONTROL INTERFACE |
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0512-435400 |
O-RING IDLER, 6" INPUT CONVEY |
|
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SOLENOID, GATE, SMART LOADER |
|
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CABLE, WAFFER, CARRIER SWITCH, REV C |
|
0512-533500 |
PUSH BUTTON CABLE |
|
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PCB, STAGE SERVO |
|
0513-419700 |
BOARD SERVO CONTROL |
|
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PCB, SMART AUTOLOADER 370 |
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PCB 4", 5", 6" LOW FLAT FINDER |
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PCB, UPPER FLAT FINDER 4"/5"/6" |
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0513-488600 |
PCB, LOWER FLAT FINDER 3" |
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0513-488700 |
PCB, UPPER FLAT FINDER, 3"' |
|
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AUTOLOAD OUTPUT WAFER SENSOR, MODEL 379 |
|
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PCB, BINARY INTERFACE 16 BIT |
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0513-496700 |
PCB, BINARY INTERFACE |
|
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BD, ASSY EXTENDER, REV D | |
0513-555000 |
PCB, SERVO MODEL 151 |
|
0514-555400 |
LAMP HOUSING, BOTTOM ASSY |
|
0514-555800 |
ILLUMINATOR, SERIES II |
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0514-562300 |
ACTINIC SHUTTER ASSY, SERIES II |
|
0514-562600 |
LAMP HOUSING, TOP ASSEMBLY |
|
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MOTOR, MAGTECH SERVO DRIVE |
|
0516-448700 |
MONITOR, FOCUS ASSEMBLY |
|
0516-460900 |
THETA UMBILICAL (990-1000WF) |
|
0516-461500 |
CABLE, X-Y INTERCONNECT |
|
0516-496800 |
CABLE, FAST PULSE CONVERTER |
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0516-496900 |
CABLE, BINARY 16 BIT |
|
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SERVO MOTOR CLAMP |
|
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PCB, SYSTEM DRIVER |
|
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PCB, SYSTEM DRIVER |
|
0523-701008 |
PCB, PMT STAGE (REPLACES P/N 0503-260300) |
|
0524-500300 |
ILLUMINATOR, SERIES I, WF |
|
0524-501000 |
LIGHT PIPE ASSY, SERIES I, WF |
|
0524-501500 |
BARREL ASSY, END PLATE |
|
0524-540600 |
ACTINIC SHUTTER ASSY, SERIES I |
|
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ACTINIC SHUTTER, SERIES II |
|
0524-561000 |
LIGHT PIPE, SERIES II (1000WF), ASSY |
|
0524-561000-2 |
LIGHT PIPE, SERIES II, REPLACEMENT |
|
0524-561100 |
ILLUMINATOR, SERIES II, WF |
|
0524-562000 |
APERTURE II FIELD, ASSY |
|
0525-358900 |
FIXED GUIDE BEARING, ANGE |
|
0525-596500 |
BEARING,ADJUSTABLE GUIDE ANGE |
|
0526-500900 |
PMT STAGE ASSEMBLY, ANGE (990/1000W) |
|
0526-503000 |
PHOTO CABLE ASSEMBLY |
|
0526-546200 |
RETICLE FINGER (990/1000WF) |
|
0526-552900 |
PMT SLIDER ASSEMBLY |
|
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REGULATOR, LOWER DIAPHRAGM |
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0526-568110 |
REGULATOR-UPPER DIAPHRAGM |
|
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REGULATOR, (900/1000) |
|
0526-568900 |
MONITOR, FOCUS, ASSEMBLY, 'C' |
|
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SOLENOID, MONITOR, ASSY, LEFT |
|
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SOLENOID, RETICLE, BACK REF, MONITOR, ASSY |
|
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SOLENOID, VALVE, 2-WAY, RAB, MOD |
|
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SOLENOID, RETICLE STAGE AIR/VACUUM |
|
0526-570100 |
SOLENOID VALVE, CHUCK VACUUM |
|
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SOLENOID VALVE, UPPER DIAPHRAGM, ASSY |
|
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SOLENOID VALVE, 2-WAY, UPPER SYSTEM |
|
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CABLE, CRT, GROUND, REV B |
|
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SOLENOID VALVE, LOW DIAPHRAGM, ASSY |
|
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SOLENOID, EDGE SWITCH, ASSY |
|
0526-570800 |
SOLENOID, RETICLE FINGER |
|
0526-570900 |
SOLENOID VALVE, SOFT VACUUM |
|
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SOLENOID, VALVE, ASSY, 2-WAY, DOD TIMED |
|
0526-576000 |
PROBE VALVE, BACK (990/1000WF) |
|
0526-576100 |
PROBE VALVE, LEFT/RIGHT |
|
0526-576700 |
ILLUMINATOR BRACKETS, SERIES II |
|
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SOLENOID, VALVE, ASSY, 2-WAY, MOD. FM |
|
0526-700331 |
THETA DRIVE ASSY, 400 STEP G |
|
0529-557700 |
LENS TEST MICROSCOPE |
|
0532-566700 |
RESET SWITCH, PUSH BUTTON |
|
0535-577200 |
AIR BEARING, SHORT, ANGE |
|
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AIR BEARING, MEDIUM, ANGE |
|
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AIR BEARING, LONG, ANGE |
|
0536-552400 |
BINARY CABLE (1100/1500) |
|
0552-664600 |
ROTARY SOLENOID (SHUTTER) |
|
 |
MOTOR, IN/OUT INDEXER, AUTO LOADER |
|
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SOLENOID WITH CABLE, GATE |
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| 0553-426200-F | ||
 |
AMP DRIVER VO13-001 |
|
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0553-605000-E | PCB, AIR GAUGE, REV E, (FLEX) (UT1100-1800) |
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0553-605000-C | PCB, AIR GAUGE, REV C, WITH MANIFOLD (UT1100-1800) |
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PCB, OPTICAL EDGE SW ANGE |
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PCB, XY SERVO, MODEL X4 |
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0553-621600 |
PCB, FOCUS CONTROL/DRIVER REP |
|
0553-623300 |
PCB, FOCUS CONTROL/DRIVER, REP |
|
0553-626000 |
PCB, WAFER ALIGNMENT |
|
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PCB, SENSOR, Y, OPTICAL, ASSY, O.E.S. |
|
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PCB, SENSOR, X, OPTICAL, ASSY, O.E.S. |
|
0553-628000 |
PCB, FOCUS CONTROL/DRIVER, ANGE |
|
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PCB, SYSTEM DRIVER, ANGE |
|
0553-662900 |
PCB, THETA INTERCONNECT |
|
0553-678400 |
PCB, LOWER FLAT FINDER A/L |
|
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PCB, UPPER FLAT FINDER |
|
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PCB, 32 BIT INTERFACE/UNIV |
|
0553-700567 |
PCB, LOWER FLAT FINDER, 6" |
|
 |
LASER COMPARATOR ASSY BOARD (1100/1500) |
|
 |
PCB, AMPLIFIER, AIR GAUGE |
|
0554-600600 |
MIRROR, Y (1100/1500) ANGE |
|
0554-600700 |
MIRROR, X (MOD.1100/1500) |
|
0554-603400 |
LAMP HOUSING, TOP ASSY (1100) |
|
0554-604300 |
LAMP HOUSING, BOTTOM ASSEMBLY |
|
 |
LIGHT PIPE ASSEMBLY (1100) |
|
 |
MIRROR, ELLIPSOIDAL M1100 |
|
0556-700856C |
THETA DRIVE MOTOR (1100/1500) |
|
 |
SWITCH, VACUUM CHUCK (1100) |
|
 |
VALVE, SOLENOID, RETICLE FRONT |
|
0556-594300 |
SOLENOID, RETICLE STAGE AIR |
|
0556-594400 |
SOLENOID, RETICLE STAGE AIR/VACUUM |
|
0556-594500 |
SOLENOID, EDGE SWITCH (1100) |
|
0556-594600 |
SOLENOID VALVE, CHUCK VACUUM |
|
0556-594700 |
SOLENOID VALVE, SOFT VACUUM |
|
0556-604800 |
AIR GAGE ASSY, (1100) ANGE |
|
0556-613200 |
THETA UMBILICAL (1100/1500) |
0556-617600 |
WAFER ALIGNMENT SYSTEM (1100) |
0556-633400 |
OPTICAL EDGE DETECTOR W/CABLE |
|
0556-635800 |
CABLE, UPPER SERVO |
|
0556-636000 |
CABLE, UT PNEUMATIC |
|
0556-636100 |
THETA CABLE, UPPER |
|
 |
CABLE, FOCUS DRIVER, REV A, (SEE NEW # 05-08-01342) |
|
0556-636500 |
CABLE, FOCUS CONTROL |
|
0556-642100 |
CABLE, ILLUMINATOR, LOWER |
|
0556-652600 |
THETA BEARING, LONG, ANGE |
|
 |
BEARING, FIXED GUIDE, ANGE |
|
0556-654100 |
BEARING, ADJUSTABLE GUIDE |
|
0556-654200 |
BEARING, FIXED GUIDE, ANGE |
|
0556-654300 |
BEARING, ADJUSTABLE GUIDE, RIGHT X |
|
0556-654900 |
HARNESS, LOWER SYSTEM DRIVER |
|
0556-661100 |
WAFER LOADER, MANUAL W/YOKES |
|
0556-682400 |
MICROSCOPE UNIT |
|
0556-687300 |
MOTOR, STEPPER SLOW/SYNC |
|
0556-688100 |
CABLE, W.A.S. LOWER (1100/1500) |
|
0556-688200 |
CABLE, W.A.S. UPPER (1100/1500) |
|
0556-690100 |
MASK, LEFT-HAMS CROSS |
|
0556-690200 |
MASK, LEFT-VAMS CROSS |
|
0556-690300 |
SYSTEM CABLE |
|
0556-697200 |
DETECTOR ASSEMBLY, LEFT, VAMS |
|
 |
DETECTOR ASSEMBLY, RIGHT, VAMS |
|
 |
DETECTOR ASSEMBLY, RIGHT, HAMS |
|
0556-697500 |
DETECTOR ASSEMBLY, LEFT, HAMS |
|
 |
MASK, ASSY, BASE RETICLE, VAMS, RIGHT, CROSS |
|
 |
MASK, ASSY, RIGHT-HAMS, CROSS (1100) |
|
0556-700824 |
PANEL (FRONT BRIDGE ASSY) |
|
 |
THETA DRIVE MOTOR (1100/1500) |
|
0559-681400 |
AUTOLOAD ASSEMBLY, 4" |
|
 |
PCB, OES TILT WINDOW |
|
0564-700177 |
LIGHT PIPE ASSEMBLY, ANGE |
|
0564-700237 |
EXPOSURE SHUTTER |
|
 |
RETICLE FINGER (1100/1500) ASSEMBLY |
|
0564-700462 |
MIRROR, ELLIPSOIDAL 1500 |
|
0566-636100 |
THETA CABLE, UPPER |
|
0566-700065 |
SPRING BLADE |
|
0574-701129 |
LIGHT PIPE ASSY (990) |
|
 |
LEFT DIDDLER (NEW) |
|
 |
RIGHT DIDDLER (NEW) |
|
06xx-xxxxxx |
||
0606-100006 |
AA 0606-100006 |
|
0606-404200 |
5" CHUCK |
|
0606-408900 |
INTERFEROMETER WASERS (8)-SET |
|
 |
MASK, 200 MICRON CROSS |
|
0608-965215 |
BEARING, TOP AND BOTTOM ELEVATOR |
|
0609-330000 |
ALLEN WRENCH KIT-1/16-MODIFIED, 3/32 MODIFIED &
5/32-MODIFIED |
|
0626-520800 |
SWITCH, RETICLE STAGE VACUUM |
|
07-xx-xxxxx |
||
07-07-00036 |
SOLENOID KITS, LARGE |
|
07-08-00780 |
O-RING KIT, 4" AUTOM.AUTOLOAD |
|
07-08-00781 |
O-RING KIT, 4/5" SMART AUTOLOAD |
|
07-08-00782 |
O-RING KIT, 6" SMART AUTOLOAD |
|
07-08-02113 |
HEIGHT STANDARD |
|
09xxx-xxxxx |
||
09131-9826 |
DISK DRIVE 5.25 |
|
09153-69201 |
DRIVE, DISKETTE 3.5" |
|
09826-66571 |
ULTRATECH CRT BOARD |
|
10-xx-xxxxx |
||
10-05-00369 |
GATE, 6" |
|
10-08-00875 |
UPPER STOP, RETICLE FINGER |
|
 |
THETA STAGE INSERT (1100/1500) |
|
 |
RETICLE FINGER |
|
10-20-12547 |
MIRROR, ELLIPSOIDAL (2500/1500) |
|
 |
OVAL AIR PROBE |
|
 |
SOLENOID
VALVE | |
 |
SOLENOID
VALVE |
|
 |
SOLENOID
VALVE |
|
10xx-xxxxxx |
||
1001-438282 |
DAYTON BLOWER |
|
1002-324200 |
AUTOLOAD ARM 4" |
|
1002-346300 |
FOOT JACK SCREW (LOADER) |
|
1002-353200 |
PULLEY, OUTPUT DRIVE |
|
1002-353300 |
PULLEY, CONVEYER |
|
1002-353400 |
REVERSING PULLEY |
|
1002-356600 |
NUT, BEARING, ADJUSTABLE |
|
1002-368400 |
ARM, FEED 5" |
|
1002-373500 |
MOTOR, STEPPER, CONVEYER |
|
1002-373700 |
MOTOR, STEPPER, INDEXER, NEW |
|
1002-376600 |
PULLEY, INDEXER |
|
1002-391200 |
PIN, LOCATING AUTOLOADER |
|
1004-000005 |
20 VOLT POWER SUPPLY |
|
1004-284600 |
MIRROR, COLD (990/1000S/1000W) |
|
 |
SHUTTER DAMPER |
|
 |
FILTER, UV SQUARE |
|
 |
SHUTTER DAMPER, BACKUP |
|
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SHUTTER DAMPER |
|
 |
LAMP, 200W MERCURY, SHORT (900/1000) |
|
1005-211600 |
GUIDE WAY, Y |
|
1005-233000 |
ANCHOR PLATE, Y |
|
 |
DRIVE ROD, Y |
|
1005-233202 |
DRIVE ROD, X (MOD 990/1000) |
|
1005-236400 |
GUIDE WAY, X, ANGE |
|
1005-299800 |
SPRING, THETA BEARING |
|
1005-701066 |
X LASER TOP PLATE |
|
1006-226201 |
CYLINDER HEAD, THETA STAGE |
|
1006-226400 |
PISTON, THETA STAGE |
|
 |
KEEPER, THETA LINK ROD |
|
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SCREW, THETA LEAD |
|
1006-249300 |
FLEXURE, THETA |
|
1006-259300 |
WINDOW, Y-PLATE |
|
 |
PEDESTAL |
|
 |
PLATE, DETENT |
|
1006-450700 |
SPIDER 990/1000S/1000W, UPPER |
|
1006-454801 |
SPIDER, LOWER (990/1000) |
|
1012-415400 |
ARM, 6", FEED |
|
1014-001002 |
AUTO LOADER, 6" AUTOMATION |
|
1015-051100 |
NUT, THETA |
|
1015-532600 |
BEARING, THETA V, GUIDE WHL |
|
1016-471500 |
MANIFOLD, PNEUMATIC |
|
1016-565100 |
SWITCH ACTUATOR PLATE |
|
1016-572000 |
CYLINDER, THETA |
|
1019-495200 |
PRINTER COVER, MODEL 1000WF |
|
 |
FEB, CELL, LENS, PAIR |
|
 |
MIRROR, DETECTOR, 2% TRANSMIT |
|
1024-514200 |
SLIDER, AIR BEARING 1000/1100 |
|
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FILTER, SHUTTER, FAB |
|
 |
PLATES, STRIKER, RETICLE |
|
1025-588400C |
SPIDER ASSY, FPI LOWER |
|
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PLATE, DETENT FPI |
|
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CYLINDER, RETICLE FINGER |
|
1026-517000 |
CAP, END, LOWER |
|
1026-517300 |
PLATE-Y, HOLDER |
|
1026-517400 |
PMT SHUTTER |
|
1026-519900 |
COVER, AIRPOT |
|
1026-549700 |
SCREW, THETA |
|
1026-549800 |
BRACKET, MOTOR MOUNTING |
|
 |
SOLONOID, VALVE, 3 WAY, MOD, FAB, (B14DK1030) |
|
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FINGER SHAFT, RETICLE |
|
 |
SOLENOID |
|
1028-580300 |
TEST PLATE, ABSOLUTE POS |
|
1032-573600 |
MOTOR, CONVEYER STEPPER |
|
 |
MOTOR, INDEXER STEPPER |
|
1047-700528 |
AIR BEARING SLIDER, ANGE |
|
1052-670300 |
GATE, 4" |
|
1052-680200 |
GATE, 5" |
|
1052-696000 |
O-RING IDLER |
|
1052-700574 |
AXEL AUTOMATION (.187x7.0" LG.) |
|
 |
FOCUS CONTROLLER BOARD |
|
1054-603500 |
ELLIPSOIDAL MIRROR, 1000W |
|
1054-604400 |
MIRROR, COLD (1100) |
|
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FILTER, UV ROUND (1100) |
|
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WINDOW, BLAST, FUSED SILLICA |
|
1054-618000 |
X LASER COVER |
|
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FAB, HOMOGENIZER, FIBER OPTICS |
|
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ADJ, ROTATION, SCREW, LENS MOUNTING |
|
1056-596300 |
FINGER SHAFT, RETICLE FINGER |
|
1056-598400 |
PLATE, (2) X STAGE STOP |
|
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DRIVE ROD X |
|
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DRIVE ROD X 8" (1100/1500) |
|
1056-599000 |
GUIDEWAY-X, 8", ANGE |
|
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NUT, SPLIT |
|
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SPACER, THETA STAGE |
|
1056-690800 |
PEDESTAL, FAB |
|
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HOMOGENIZER, FIBER OPTICS (1500) |
|
 |
LENS PLCX |
|
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FILTER, UV, CUT OFF (UTS 1500) |
|
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SHIELD, BLAST |
|
1064-700434 |
PRISM GUARD |
|
1074-700528 |
SLIDER, AIR BEARING, MOD. 990 ANGE |
|
 |
LIGHT STOP, RIGHT HAMS, .31 |
|
 |
LIGHT STOP, LEFT HAMS, .31 |
|
 |
FAB, BASE, XMASK, LH, HAMS, .31 (1500-1800) |
|
 |
FAB, BASE, XMASK, RH, HAMS, .31 (1500-1800) |
|
1084-70715 |
PROBE BLOCK (1500/1700) OVAL TYPE |
|
 |
STRIKER, CENTER |
|
14-xx-xxxxx |
||
14-20-03808-03 |
APERTURE RETICLE 30X18 |
|
14-20-03808-04 |
MVS APERTURE, RETICLE 250, 30x18 |
|
14-20-03808-21 |
APERTURE 5 FIELD 19.8 x 22 |
|
15-xx-xxxxx |
||
15-08-00928-01 |
LASER TRANS, EXCEL 1001F |
|
15-08-00928-02 |
LASER TRANS, WITH FUNCTIONAL TUBE, HP 5501B, RBLT |
15-08-03691 |
COGNEX POWER SUPPLY |
17-xx-xxxxx |
||
1700 Lens Ex. |
1700 LENS ANGE |
|
18-xx-xxxxx |
||
18-05-00325 |
POWER SUPPLY, ANGE HA-UPR500CLE |
|
20-xx-xxxxx |
||
20-06-00140 |
PLUG, LASER, ALIGN |
|
 |
LASER, RECEIVER (2XXX)(10780F) |
|
25-08-03844 |
FIBER-OPTIC BUNDLE, MVS ILLUM |
|
2xxx-xxxxxx |
||
2108-000302 |
SENSOR, REFLECTIVE OUTPUT |
|
 |
CONNECTOR |
|
2203-000004 |
LAMP POWER SUPPLY, MOD.500A/B, ANGE |
|
2502-000012 |
BEARING, GATE |
|
2502-000014 |
BEARING, AUTOLOADER |
|
2502-000022 |
BEARING, SMART AUTOLOADER |
|
2502-000025 |
BEARING, BALL, RETICLE FINGER |
|
2503-000007 |
BEARING, SPACER SHAFT |
|
2504-110015 |
O-RING, 4"/5"' AUTOLOADER |
|
2504-110029 |
O-RING, 6" SMART AUTOLOADER |
|
2504-110039 |
O-RING, 6" SMART AUTOLOADER |
|
2504-110043 |
O-RING, 6" SMART AUTOLOADER |
|
2505-000003 |
SPRING, TENSION MOTOR |
|
2505-000026 |
SPRING, COMPRESSION |
|
 |
SPRING, AUTOLOADER |
|
 |
SPRING FOR OPTICAL EDGE FINDER |
|
2505-000048 |
SPRING, TENSION MOTOR |
|
 |
CLAMP, SWIVEL PAD |
|
2509-000034 |
MOUNT (AUTOLOADER, STEP MOTOR MOUNT) |
|
2509-000041 |
MANIPULATOR |
|
 |
DASHPOT, AUTOMATION LOADER |
|
 |
TIMING BELT, FOCUS MOTOR |
|
 |
BELT, TIMING PMT WINDOW MOTOR |
|
 |
BELT, TIMING |
|
2510-000021 |
BELT, PULLEY, TIMING |
|
2510-0000220 |
TIMING BELT |
|
2522-110203 |
DRIVE COUPLER, THETA |
|
2522-110204 |
COUPLER, THETA DRIVE |
|
2532-000007 |
REGULATOR, FOCUS |
|
2532-000009 |
REGULATOR, MINIATURE, 0-5 PSI |
|
2532-000010 |
REGULATOR, MINIATURE, 0.5-30 P |
|
2533-000008 |
SOLENOID |
|
2533-000030 |
PROBE VALVE, LEFT/RIGHT/BACK |
|
 |
VALVE, 3 WAY SOLENOID |
|
 |
AIRPOT (RETICLE FINGER) |
|
2602-000026 |
FILTER WRATTEN GEL GREEN |
|
2602-000027 |
FILTER WRATTEN GEL BLUE |
|
 |
2606-000018 | 50M SINTERED BRONZE FILTER |
2901-000001 |
LEADER OSCILLOSCOPE |
|
2901-000025 |
LENS TEMPERATURE PROBE |
|
2902-000020 |
COMPUTER, H.P. 9826/226 |
|
 |
2902-000021 | PRINTER, CANON P2020 ANGE |
 |
3902-000023 | PRINTER, OKIDATA, ANGE |
2920-000002 |
HEAD, LVDT |
|
2920-000003 |
ELECTRIC GAUGE, LVDT, AMP 842 |
|
2920-000008 |
UT CLEANROOM PRINT PAPER |
|
2920-000009 |
PAPER, PRINTER, 3" |
|
3x-xx-xxxxx |
||
30-08-02008 |
COMPUTER SYSTEM, HP 362 |
|
31-08-02636 |
COGNEX 4400 CONTROLLER 1700 MVS |
|
31-20-01894 |
MONITOR, TEKTRONIX MODEL 620 |
|
32-08-04001 |
KEYBOARD, HP 362 (107 KEYS) |
|
33-20-00942 |
MATROX VIDEO PCB (VG640) |
|
34-08-00483 |
DISC DRIVE |
|
38-15-07587 |
OAI METER, 358 |
|
3xxx-xxxxxx |
||
 |
BRUSH, SERVO MOTOR, MAGTECH |
|
 |
BELT, TIMING |
|
3601-000000 |
LASER RECEIVER 3/DETECTOR REP. |
|
3601-000001 |
AIR TRANSDUCER |
|
3803-000004 |
MIRROR, REHEATED 38mm |
|
3803-000005 |
MIRROR, REHEATED 25mm |
|
 |
LASER RECEIVER/DETECTOR |
|
3806-000004 |
BEAM SPLITTER |
|
3806-000005 |
INTERFEROMETER CUBE, LASER |
|
3806-000006 |
BEAM BENDER, LASER COMPONENTS |
|
3806-000023 |
INDEXER UPPER/LOWER SENSOR |
|
3806-000028 |
WAFER SENSOR, AUTOLOAD |
|
3806-000031 |
SENSOR, FLAG GATE |
|
3806-000032 |
LASER TRANSDUCER HP5501A ANGE WITH FUNCTIONAL TUBE |
|
 |
ADAPTER, CABLE, 5501B T0 5517B |
|
3901-000018 |
LAMP, MERCURY 200W (990/1000S/1000W) ARC |
|
 |
LAMP, MERCURY 200W, (1100/1500) ARC |
|
 |
PMT PHOTOMULTIPLIER TUBE |
|
38-xx-xxxxx |
||
38-15-07585-03 |
PROBE-ONLY, OAI 400NM |
|
38-15-07587 |
OAI METER, 358 |
|
4xxx-xxxxxx |
||
4001-000005 |
POWER SUPPLY, 20 VOLT NON-REG |
|
 |
P0WER SUPPLY, LAMDA 15 VOLT |
|
 |
POWER SUPPLY, 24 V.(POS) ANGE |
|
 |
FAST PULSE CONVERTER BOARD |
|
 |
PCB, AUTOLOADER CONTROLLER, MODEL 380 |
|
4210-000004 |
PCB, POWER CONNECTOR |
|
 |
SHUTTER CONTROL DRIVE BOX, ANGE |
|
 |
SOLENOID, LEDAX ROTARY |
|
 |
THERMISTER CURRENT LIMITER |
|
5x-xx-xxxxx |
||
|
BRUSH SET, INLAND SERVO MOTOR (SEE NEW #: 01-08-04851) |
|
 |
INTAKE FILTER, BRONZE |
|
 |
EXHAUST FILTER, BRONZE |
|
57-08-01228 |
REGULATOR, PRESS 1/4, 1/8NPT |
|
57-20-03722 |
TRANSDUCER TYPE 1001 E/P |
|
5xxx-xxxxxx |
||
 |
SWITCH, VACUUM RETICLE |
|
5106-000003 |
SWITCH, PRESSURE, MOTOR #3 |
|
5106-000009 |
SWITCH, WAFER SENSOR |
|
 |
LIMIT SWITCH |
|
5107-000006 |
SWITCH, STAGE LIMIT |
|
 |
SWITCH, MICRO |
|
 |
SWITCH, LIMIT, THETA DRIVE |
|
5107-000019 |
MICROSWITCH, ACTUATED, LEVER |
|
 |
DIAPHRAGMS, ROLLING |
|
5405-000004 |
LVDT STAND |
|
5605-000001 |
FILTER, LINE CDE-ELECTRONIC LINE FILTER |
|
 |
BROWN & SHARPE |
|
6x-xx-xxxxx |
||
 |
POWER SUPPLY, 5 VOLT, ANGE |
|
60-06-00136 |
POWER SUPPLY, 24 VOLT (NEG) |
|
60-06-00137 |
POWER SUPPLY, 24 VOLT, POS, ANGE |
|
6xxx-xxxxxx |
||
6805-000001 |
STANDOFF/INSULATOR, CERAMIC |
|
6805-000006 |
STANDOFF, PLASTIC |
|
6805-000008 |
CERAMIC UMBILICAL STAND |
|
7xxx-xxxxxx |
||
7001-200004 |
EP BELT KIT FOR 5", 4", 3" UTS AUTOMATION AUTOLOADER |
|
8x-xxxxxx |
||
83-20-00123 |
MOUNT, VIBRATION WITH 10-32 STUD |
|
Misc |
||
 |
01-W38398-01A | |
 |
3496BO1A | |
PCB,
AUTO APETURE PMT |
||
9826/226 |
9826/226 W/5 1/4" FLOPPY DRIVE |
|
 |
9553-700-974-E | |
ABS Plate |
ABS PLATE |
|
 |
PCB, AMP BOARD MODEL # 140 |
|
CABLE, HP5517B |
ADAPTOR CABLE-HP5517B |
|
 |
FOLDING MIRROR BEARINGS |
|
FORCE GAGE |
FORCE GAGE, 0-32 OUNCES |
|
| HP 10780C | RECEIVER FOR AGILENT LASER INTERFEROMETER POSITIONING SYSTEM |
|
HP 34-08-00423 |
HP 3.5" FLOPPY DRIVE |
|
HP 362 |
CONTROLLER W/HP BASIC CONFIGURATION ONLY-USED |
|
 |
HD-HIL ID MODULE |
|
HP-9826 |
HP 9826 COMPUTER |
|
 |
RS232 98626A |
|
 |
LASER TRANSDUCER, HP 5501B |
|
 |
LASER TRANSDUCER, HP 5517A |
|
 |
LASER TRANSDUCER, HP 5517B |
|
HP5517C |
LASER TRANSDUCER, HP 5517C |
|
HP PLOTTER |
HP PLOTTER MODEL 7550A |
|
 |
REGULATOR POWER SUPPLY |
|
LENS, 990 |
STEPPER 990 LENSE REPLACEMENT |
|
 |
||
LVDT HEAD |
LVDT HEAD |
|
LVDT METER/GAUGE AMP |
LVDT METER/GAUGE AMP |
|
OAI METER |
OAI METER W/ 420 PROBE |
|
 |
PCB, PMT STEPPER CONTROL (MODEL# 110) |
|
PR990 |
PRINTER, RIBBON, CANON, 990 |
|
 |
PRESSURE REGULATOR |
|
RM01 ILLUMINATOR MOUNT |
RM01 ILLUMINATOR MOUNT |
|
Tool, 6" CXCY |
TOOL, 6" CXCY |
|
Tool, 6" CXCY:CxCy for 3" |
CYCY TOOL FOR 3" ROUND |
|
 |
POWER SUPPLY |
|
UTS Y MIRROR COVER |
MIRROR, Y COVER |
|
UTS 1000 WIDE FIELD |
STEPPER, ULTRATECH 1000 WIDE FIELD |
|
UTS 1100 |
STEPPER, ULTRATECH MODEL 1100 |
|
 |
CABLE, LBO-51MA DISPLAY |
|
UTS 1500 |
STEPPER, ULTRATECH MODEL 1500 |
|
 |
SENSOR |
|
 |
LENSE MOUNT |
|
UTS 6" AUTOLOAD BELT KIT |
BELT KIT, AUTOLOAD SMART, 6" |
|
UTS FOCUS MONITOR ASSEMBLY, 'C' |
MONITOR, UTS FOCUS ASSEMBLY, 'C' |
|
UTS EXHAUST COUPLER |
EXHAUST COUPLER |
|
UTS SCAN TEST TAPE |
UTS SCAN TEST TAPE (MODEL 900) |
|
|
UTS X MIRROR COVER |
MIRROR COVER, UTS X |
|
WTC |
MODIFICATION PART |
|
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