Ultratech®

Ultratech® is a leading supplier of lithography STEPPERs, Ultratech® STEPPERs are used for imaging and processing for semiconductor, advanced packaging and nanotechnology industries. KSEquipment, Inc. has a vast collection of Ultratech STEPPER parts (Click here for our PARTS LIST). Request a Quote

 

 

 

 

 

 

Parts Beginning with...
01	04	07	14	18	4x	7x
02	05	09	15	2x	5x	8x
03	06	10	17	3x	6x	Misc part #s

Ultratech® Spare Parts List - Additional parts not mentioned may also be available,
please call +1 (831)-722-7173

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	Item	Description
01-xx-xxxxx
	01-02-00004	PMT SLIDER (400 STEP)
	01-02-00163	CHUCK FOR 1000WF STD 4"
	01-02-00258	FLAG POLE THETA STAGE
	01-02-00272-001	REGULATOR-USED
	01-02-00272-01	REGULATOR, PRESSURE (FOCUS)
	01-02-00326	MASK, CROSS HOLDER, LEFT
	01-02-00327	MASK HOLDER, CROSS RIGHT
	01-02-00330	MOTOR, INLAND SERVO MOTOR
	01-05-00185	CHUCK 3" (ALL MODELS) Custom Built
	01-05-00186	CHUCK 4" (ALL MODELS)
	01-05-00187	CHUCK 5" (ALL MODELS)
	01-05-00189	CHUCK 6" (ALL MODELS)
Custom Built Parts	01-05-00190	CHUCK 8"
	01-05-00225	VOICE COIL THETA STAGE
	01-05-00269	LAMP HOUSING, TOP ASSY (1100)
	01-05-95247	THETA STAGE INSERT
	01-06-00021	SLIDER ASSY, W.A.S. ANGE
	01-06-00061	AIR GAUGE ASSY (1500) ANGE
	01-06-00072	CHUCK 5"
	01-06-00199	SHUTTER MOTOR, ASSY
	01-08-00158	MOTOR, RIGHT WINDOW
	01-08-00159	MOTOR, LEFT WINDOW
	01-08-0061-03	LINK ROD (1100/1500)
	01-08-00616-01	THETA LINK ROD
	01-08-00762	SWITCH ASSY, HOME (1100/1500)
	01-08-00961	SHUTTER, EXPOSURE (PEN MOTOR ON 1500)
	01-08-00962	OBLONG FROSTY CHUCK
	01-08-00962-05	CHUCK 5" OBLONG FROSTY, ALUMINUM
	01-08-00962-06	OBLONG CHUCK, MEGAFROSTY W/SIDE BARB
	01-08-01154	RETICLE SLIDER 1500/2700
	01-08-01665	RETICLE FINGER ASSY, M1700
	01-08-01720-04	OBLONG WAFER BLANK 6" D
	01-08-01720-SS	CHUCK 6", OBLONG FROSTY
	01-08-02052	THETA UMBILICAL ASSY 1500
	01-08-03694-06	CHUCK 6", OBLONG MF, STAINLESS STEEL
	01-08-04851	BRUSH SET, SERVO MOTOR, INLAND (Former # 50-02-00334)
02-xx-xxxxx
	02-01-00035	SPIDER,  FPI LOWER
	02-15-02458-02	PLATE, INSERT, BASH, 4", REV E
03-xx-xxxxx
	0304-232900	FAST PULSE CONVERTOR
	03-06-02032
	03-06-00213	UTS STEPPER MOTOR CONTROLLER BOARD
	03-06-00035	AIR GAUGE CONTROLLER
	03-08-00038	PCB, STAGE AMPLIFIER, ANGE
	03-08-00090	PCB, SERVO BOARD, 944
	03-08-00096	BD, 944, MOTOR DRIVER, ASSY, STAGE DRIVER BOARD
	03-08-01012-B	LOWER FLAT FIND BOARD (4-5")
	03-08-01452	PCB, 1500 PRISM CONTROL
	03-15-02305	PCB PHOTO PREAMP
	03-15-02702	STEPPER MOTOR/COOLER, TRANSITION BOARD, REV C, ASH
	03-15-04930-01	PCB, GENERAL I/O # 2 DRIVE, BREAKOUT, TRANSITION
	03-15-06672	ASSY, PCB POP-UP INTERLOCK
	03-20-00766	BACKPLANE, BD, UTS, POWER DRIVER, REV A
	03-20-03342	BRD, TRANSITION G10 # 2, DRIVE BREAKOUT
	03-20-03996	PCB WTC BREAKOUT ASSY
	03-20-00166
	03-20-00704 combo	PCB,
	03-20-00760	AIR GAUGE, REV A (UT 2000)
	03-20-00760-AM	AIR GAUGE, REV A with Flex Manifold (UT 2000)
	03-20-00871
	03-20-00784-02, 03-20-01967	SLAVE PROCESSOR, VME, FOCUS CONTROL, ASH, BD, 5 AXIS, ASSY
	03-20-00778	BOARD, DSPL, SLAVE PROCESSOR, REV A
	03-20-00784-02, 03-20-04940 combo	W/VME SLAVE PROCESSOR
	03-20-00784, 03-20-01967 combo	FOCUS CONTROL, ASH- VME SLAVE PROCESSOR
	03-20-00784, 03-20-01933 combo	ALIGN, ASH, 5 AXIS - VME SLAVE PROCESSOR
	03-20-00784, 03-20-01995 combo	STAGE, ASH, 5 AXIS - VME SLAVE PROCESSOR
	03-20-00870-B	PCB, VME COMBO
	03-20-00933	POWER SUPPLY, SWITCHING
	03-20-00933-03	POWER SUPPLY, REV A.
	03-20-00954	MOTOR, STEPPER MUX PCB
	03-20-00963	PNEUMATIC, I/0, BD
	03-20-00978	SOLENOID DRIVER
	03-20-01082	GENERAL I/O BOARD
	03-20-01124-B	PCB TRANSITION, STAGE ASH
	03-20-01130-C	PCB TRANSITION, STAGE MOTOR DRIVER
	03-20-01130-04-A	PCB TRANSITION, STAGE MOTOR DRIVER
	03-20-02032	TRANSITION, PWR, DISTR, 5 AXIS
	03-20-01193	SPARE MOTOR, BREAKOUT
	03-20-01193-SET	MOTOR, BREAKOUT
	03-20-01299	PCB TRANSITION, ALIGNMENT, ASH
	03-20-01321	ALIGNMENT ANALOG
	03-20-01379-A	POWER SUPPLY - UNIVERSAL MICROELECTRONICS
	03-20-01420	AIR GAUGE AMPLIFIER
	03-20-01588	PCB TRANSITION, MULTIPLEXER
	02-20-01594	PCB TRANSITION, STEPPER MOTOR, ASH
	03-20-01600	TRANSITION, STEPPER MOTOR, DRIVER
	03-20-01693	TRANSITION, SOLENOID DRIVER
	03-20-01705	TRANSITION, GENERAL I/O
	03-20-01855	SHUTTER INTERCONNECT, ASSY
	03-20-01926	LASER, DISTR, 5 AXIS
	03-20-01939
	03-20-01955	FOCUS, BD, A/D, 5 AXIS
	03-20-01961	TRANSITION, FOCUS, ASH, 5 AXIS
	03-20-01967, 03-20-00784-02	SLAVE PROCESSOR, VME, FOCUS CONTROL, ASH, BD, 5 AXIS, ASSY
	03-20-01989	FOCUS DRIVER, 5 AXIS
	03-20-02008 with CABLES	PCB STAGE BREAKOUT ASSY. CABLES (05-20-02364-01, 05-20-02364-02)
	03-20-02040-A	TRANSITION, FOCUS DRIVER
	03-20-02040	TRANSITION, FOCUS DRIVER
	03-20-02211-C	BREAKOUT, GENERAL
	03-20-02294-A	PCB BREAKOUT l GENERAL I/O
	03-20-02565-X	IC, PLA, PROGRAMMED, STAGE STATAS (IN X-AXIS ASH CARD/03-20-01403-10)
	03-20-02567	PMT AMP M200
	03-20-04940-A	5 AXIS STAGE ASH PCB
04-xx-xxxxx
	04-08-03404	ACTINIC SHUTTER, MVS
05-xx-xxxxx
	05-05-00389	SOLENOID (GATE)
	05-06-00036-03	CABLE, LIMIT SWITCH W/M.S.
	05-06-00037	CABLE, LIMIT SWITCH  W/MICRO-SWITCH
	05-08-02219	CABLE, CRT, GROUND, REV B
	05-08-01342	CABLE, FOCUS DRIVER  REV A
05xx-xxxxxx
	0502-322100	O-RING IDLER, 3"/4"/5" SM. LOAD
	0502-322400	IDLER PULLEY
	0503-203800	PCB, STAGE AMPLIFIER, MOTOR #140
	0503-203800	PCB, STAGE AMPLIFIER, MOTOR #160
	0503-230600	PCB, 32 BIT INTERFACE
	0503-238000	PCB, COMPARATOR CONNECTOR
	0503-242900	PCB, FAST PULSE CONVERTER
	0503-265702	PCB, STAGE SERVO CONTROLLER
	0503-292900	PCB, BINARY INTERFACE
	0503-300700	PCB, HP COMPARATOR
	0503-319200	PCB, FOCUS CONTROL INTERFACE
	0503-326600	AUTO PHOTO CONTROLLER
	0503-353300	CONVEYER PULLEY
	0503-398200	PCB, SHUTTER DRIVER, MODEL 200
	0503-429300-1	MOTOR DRIVER, MODEL # 311
	0503-429300-2	PNEUMATIC SENSOR, MODEL # 184
	0504-202600	ILLUMINATOR, SERIES I, STAND.
	0504-286200	END PLATE BARREL ASSEMBLY
	0504-286300	LIGHT PIPE ASSY (900/1000S)
	0505-364300	THETA BEARING, SHORT, ANGE
	0505-374900	MIRROR, X (990-1000WF)
	0505-375000	MIRROR, Y (990-1000WF)ANGE
	0506-243101	PMT STAGE ASSY. ANGE
	0506-245100	MOTOR, SLOW/SYNC STEPPER 200
	0506-257200	DIAPHRAGM, REGULAR
	0506-270300	PMT SUPPLY SOCKET
	0506-277300	CABLE ILLUMINATOR POWER CABLE
	0506-353500	MASK, CROSS HOLDER, LEFT
	0506-353600	MASK HOLDER, RIGHT CROSS
	0506-364600	LINK ROD (990/1000S/1000WF)
	0509-285400	CABLE, EXT LONG, REV A
	0509-296501	PRESSURE GAUGE ASSEMBLY
	0509-313900	HEIGHT GAUGE, BENCHMARKS
	0509-350800	AIR BAG FILL TOOL
	0509-354700	SHIM KIT, SERVO MOTOR
	0509-485100	SWITCH, CHUCK VACUUM
	0509-489900	PCB, FOCUS CONTROL INTERFACE
	0512-435400	O-RING IDLER, 6" INPUT CONVEY
	0512-470000	SOLENOID, GATE, SMART LOADER
	0512-477600	CABLE, WAFFER, CARRIER SWITCH, REV C
	0512-533500	PUSH BUTTON CABLE
	0513-418700	PCB, STAGE SERVO
	0513-419700	BOARD SERVO CONTROL
	0513-467000	PCB, SMART AUTOLOADER 370
	0513-470400	PCB 4", 5", 6" LOW FLAT FINDER
	0513-473500	PCB, UPPER FLAT FINDER 4"/5"/6"
	0513-488600	PCB, LOWER FLAT FINDER 3"
	0513-488700	PCB, UPPER FLAT FINDER, 3"'
	0513-491400	PCB, AUTOLOAD OUTPUT SENSOR
	0513-496700	PCB, BINARY INTERFACE 16 BIT
	0513-496700	PCB, BINARY INTERFACE
	0513-497100	BD, ASSY EXTENDER, REV D
	0513-555000	PCB, SERVO MODEL 151
	0514-555400	LAMP HOUSING, BOTTOM ASSY
	0514-555800	ILLUMINATOR, SERIES II
	0514-562300	ACTINIC SHUTTER ASSY, SERIES II
	0514-562600	LAMP HOUSING, TOP ASSEMBLY
	0515-410700	MOTOR, MAGTECH SERVO DRIVE
	0516-448700	MONITOR, FOCUS ASSEMBLY
	0516-460900	THETA UMBILICAL (990-1000WF)
	0516-461500	CABLE, X-Y INTERCONNECT
	0516-496800	CABLE, FAST PULSE CONVERTER
	0516-496900	CABLE, BINARY 16 BIT
	0519-487800	SERVO MOTOR CLAMP
	0523-528100	PCB, SYSTEM DRIVER
	0523-585800	PCB, SYSTEM DRIVER
	0523-701008	PCB, PMT STAGE (REPLACES P/N 0503-260300)
	0524-500300	ILLUMINATOR, SERIES I, WF
	0524-501000	LIGHT PIPE ASSY, SERIES I, WF
	0524-501500	BARREL ASSY, END PLATE
	0524-540600	ACTINIC SHUTTER ASSY, SERIES I
	0524-560900	ACTINIC SHUTTER, SERIES II
	0524-561000	LIGHT PIPE, SERIES II (1000WF), ASSY
	0524-561000-2	LIGHT PIPE, SERIES II, REPLACEMENT
	0524-561100	ILLUMINATOR, SERIES II, WF
	0524-562000	APERTURE II FIELD, ASSY
	0525-358900	FIXED GUIDE BEARING, ANGE
	0525-596500	BEARING,ADJUSTABLE GUIDE ANGE
	0526-500900	PMT STAGE ASSEMBLY, ANGE (990/1000W)
	0526-503000	PHOTO CABLE ASSEMBLY
	0526-546200	RETICLE FINGER (990/1000WF)
	0526-552900	PMT SLIDER ASSEMBLY
	0526-568100	REGULATOR, LOWER DIAPHRAGM
	0526-568110	REGULATOR-UPPER DIAPHRAGM
	0526-568210	REGULATOR, (900/1000)
	0526-568900	MONITOR, FOCUS, ASSEMBLY, 'C'
	0526-569200	SOLENOID, MONITOR, ASSY, LEFT
	0526-569300	SOLENOID, RETICLE, BACK REF, MONITOR, ASSY
	0526-569700	SOLENOID, VALVE, 2-WAY, RAB, MOD
	0526-569800	SOLENOID, RETICLE STAGE AIR/VACUUM
	0526-570100	SOLENOID VALVE, CHUCK VACUUM
	0526-570200	SOLENOID VALVE, UPPER DIAPHRAGM, ASSY
	0526-570300	SOLENOID VALVE, 2-WAY, UPPER SYSTEM
	0526-570500	CABLE, CRT, GROUND, REV B
	0526-570600	SOLENOID VALVE, LOW DIAPHRAGM, ASSY
	0526-570700	SOLENOID, EDGE SWITCH, ASSY
	0526-570800	SOLENOID, RETICLE FINGER
	0526-570900	SOLENOID VALVE, SOFT VACUUM
	0526-574500	SOLENOID, VALVE, ASSY, 2-WAY, DOD TIMED
	0526-576000	PROBE VALVE, BACK (990/1000WF)
	0526-576100	PROBE VALVE, LEFT/RIGHT
	0526-576700	ILLUMINATOR BRACKETS, SERIES II
	0526-585000	SOLENOID, VALVE, ASSY, 2-WAY, MOD. FM
	0526-700331	THETA DRIVE ASSY, 400 STEP G
	0529-557700	LENS TEST MICROSCOPE
	0532-566700	RESET SWITCH, PUSH BUTTON
	0535-577200	AIR BEARING, SHORT, ANGE
	0535-577300	AIR BEARING, MEDIUM, ANGE
	0535-577400	AIR BEARING, LONG, ANGE
	0536-552400	BINARY CABLE (1100/1500)
	0552-664600	ROTARY SOLENOID (SHUTTER)
	0552-665200	MOTOR, IN/OUT INDEXER, AUTO LOADER
	0552-681900	SOLENOID WITH CABLE, GATE
	0553-426200-F
	0553-602400	AMP DRIVER VO13-001
	0553-605000-E	PCB, AIR GAUGE, REV E, (FLEX) (UT1100-1800)
	0553-605000-C	PCB, AIR GAUGE, REV C, WITH MANIFOLD (UT1100-1800)
	0553-615900	PCB, OPTICAL EDGE SW ANGE
	0553-619400	PCB, XY SERVO, MODEL X4
	0553-619408
	0553-621600	PCB, FOCUS CONTROL/DRIVER REP
	0553-623300	PCB, FOCUS CONTROL/DRIVER, REP
	0553-626000	PCB, WAFER ALIGNMENT
	0553-627200	PCB, SENSOR, Y, OPTICAL, ASSY, O.E.S.
	0553-627300	PCB, SENSOR, X, OPTICAL, ASSY, O.E.S.
	0553-628000	PCB, FOCUS CONTROL/DRIVER, ANGE
	0553-662600	PCB, SYSTEM DRIVER, ANGE
	0553-662900	PCB, THETA INTERCONNECT
	0553-678400	PCB, LOWER FLAT FINDER A/L
	0553-678500	PCB, UPPER FLAT FINDER
	0553-700340	PCB, 32 BIT INTERFACE/UNIV
	0553-700567	PCB, LOWER FLAT FINDER, 6"
	0553-700974	PCB, COMPARATOR (1100/1500)
	0553-701156	PCB, AMPLIFIER, AIR GAUGE
	0554-600600	MIRROR, Y (1100/1500) ANGE
	0554-600700	MIRROR, X (MOD.1100/1500)
	0554-603400	LAMP HOUSING, TOP ASSY (1100)
	0554-604300	LAMP HOUSING, BOTTOM ASSEMBLY
	0554-608400	LIGHT PIPE ASSEMBLY (1100)
	0554-700584	MIRROR, ELLIPSOIDAL M1100
	0556-700856C	THETA DRIVE MOTOR (1100/1500)
	0556-593900	SWITCH, VACUUM CHUCK (1100)
	0556-594200	VALVE, SOLENOID, RETICLE FRONT
	0556-594300	SOLENOID, RETICLE STAGE AIR
	0556-594400	SOLENOID, RETICLE STAGE AIR/VACUUM
	0556-594500	SOLENOID, EDGE SWITCH (1100)
	0556-594600	SOLENOID VALVE, CHUCK VACUUM
	0556-594700	SOLENOID VALVE, SOFT VACUUM
	0556-604800	AIR GAGE ASSY, (1100) ANGE
	0556-613200	THETA UMBILICAL (1100/1500)
	0556-617600	WAFER ALIGNMENT SYSTEM (1100)
	0556-633400	OPTICAL EDGE DETECTOR W/CABLE
	0556-635800	CABLE, UPPER SERVO
	0556-636000	CABLE, UT PNEUMATIC
	0556-636100	THETA CABLE, UPPER
	0556-636400	CABLE, FOCUS DRIVER, REV A, (SEE NEW # 05-08-01342)
	0556-636500	CABLE, FOCUS CONTROL
	0556-642100	CABLE, ILLUMINATOR, LOWER
	0556-652600	THETA BEARING, LONG, ANGE
	0556-654000	BEARING, FIXED GUIDE, ANGE
	0556-654100	BEARING, ADJUSTABLE GUIDE
	0556-654200	BEARING, FIXED GUIDE, ANGE
	0556-654300	BEARING, ADJUSTABLE GUIDE, RIGHT X
	0556-654900	HARNESS, LOWER SYSTEM DRIVER
	0556-661100	WAFER LOADER, MANUAL W/YOKES
	0556-682400	MICROSCOPE UNIT
	0556-687300	MOTOR, STEPPER SLOW/SYNC
	0556-688100	CABLE, W.A.S. LOWER (1100/1500)
	0556-688200	CABLE, W.A.S. UPPER (1100/1500)
	0556-690100	MASK, LEFT-HAMS CROSS
	0556-690200	MASK, LEFT-VAMS CROSS
	0556-690300	SYSTEM CABLE
	0556-697200	DETECTOR ASSEMBLY, LEFT, VAMS
	0556-697300	DETECTOR ASSEMBLY, RIGHT, VAMS
	0556-697400	DETECTOR ASSEMBLY, RIGHT, HAMS
	0556-697500	DETECTOR ASSEMBLY, LEFT, HAMS
	0556-698100	MASK, ASSY, BASE RETICLE, VAMS, RIGHT, CROSS
	0556-698200	MASK, ASSY, RIGHT-HAMS, CROSS (1100)
	0556-700824	PANEL (FRONT BRIDGE ASSY)
	0556-700856	THETA DRIVE MOTOR (1100/1500)
	0559-681400	AUTOLOAD ASSEMBLY, 4"
	0563-700427	PCB, OES TILT WINDOW
	0564-700177	LIGHT PIPE ASSEMBLY, ANGE
	0564-700237	EXPOSURE SHUTTER
	0564-700435	RETICLE FINGER (1100/1500) ASSEMBLY
	0564-700462	MIRROR, ELLIPSOIDAL 1500
	0566-636100	THETA CABLE, UPPER
	0566-700065	SPRING BLADE
	0574-701129	LIGHT PIPE ASSY (990)
	0586-701413	DIDDLER (NEW)
	0586-701414	DIDDLER (NEW)
06xx-xxxxxx
	0606-100006	AA 0606-100006
	0606-404200	5" CHUCK
	0606-408900	INTERFEROMETER WASERS (8)-SET
	0606-446200	MASK, 200 MICRON CROSS
	0608-965215	BEARING, TOP AND BOTTOM ELEVATOR
	0609-330000	ALLEN WRENCH KIT-1/16-MODIFIED, 3/32 MODIFIED & 5/32-MODIFIED
	0626-520800	SWITCH, RETICLE STAGE VACUUM
07-xx-xxxxx
	07-07-00036	SOLENOID KITS, LARGE
	07-08-00125	THERMISTOR INRUSH CURRENT LIMITER
	07-08-00780	O-RING KIT, 4" AUTOM.AUTOLOAD
	07-08-00781	O-RING KIT, 5" SMART AUTOLOAD
	07-08-00782	O-RING KIT, 6" SMART AUTOLOAD
	07-08-02113	HEIGHT STANDARD
	07-206	O-RING KIT, 4"/5" SMART AUTOLOADER
09xxx-xxxxx
	09131-9826	DISK DRIVE 5.25
	09153-69201	DRIVE, DISKETTE 3.5"
	09826-66571	ULTRATECH CRT BOARD
10-xx-xxxxx
	10-05-00369	GATE, 6"
	10-08-00875	UPPER STOP, RETICLE FINGER
	10-08-01143A	THETA STAGE INSERT (1100/1500)
	10-08-01161	RETICLE FINGER
	10-20-02646-02	RIGHT FOCUS ACTUATOR ASSEMBLY, REV P
	10-20-12547	MIRROR, ELLIPSOIDAL (2500/1500)
10xx-xxxxxx
	1001-438282	DAYTON BLOWER
	1002-324200	AUTOLOAD ARM 4"
	1002-346300	FOOT JACK SCREW (LOADER)
	1002-353200	PULLEY, OUTPUT DRIVE
	1002-353300	PULLEY, CONVEYER
	1002-353400	REVERSING PULLEY
	1002-356600	NUT, BEARING, ADJUSTABLE
	1002-368400	ARM, FEED  5"
	1002-373500	MOTOR, STEPPER, CONVEYER
	1002-373700	MOTOR, STEPPER, INDEXER, NEW
	1002-376600	PULLEY, INDEXER
	1002-391200	PIN, LOCATING AUTOLOADER
	1004-000005	20 VOLT POWER SUPPLY
	1004-284600	MIRROR, COLD (990/1000S/1000W)
	1004-291501	SHUTTER DAMPER
	1004-292401	FILTER, UV SQUARE
	1004-356300	SHUTTER DAMPER, BACKUP
	1004-356400	SHUTTER DAMPER
	1004-401800	LAMP, 200W MERCURY, SHORT (900/1000)
	1005-211600	GUIDE WAY, Y
	1005-233000	ANCHOR PLATE, Y
	1005-233101	DRIVE ROD, Y
	1005-233202	DRIVE ROD, X  (MOD 990/1000)
	1005-236400	GUIDE WAY, X,  ANGE
	1005-299800	SPRING, THETA BEARING
	1005-701066	X LASER TOP PLATE
	1006-226201	CYLINDER HEAD, THETA STAGE
	1006-226400	PISTON, THETA STAGE
	1006-231200	KEEPER, THETA LINK ROD
	1006-249000	SCREW, THETA LEAD
	1006-249300	FLEXURE, THETA
	1006-259300	WINDOW, Y-PLATE
	1006-450402	PEDESTAL
	1006-450501	PLATE, DETENT
	1006-450700	SPIDER 990/1000S/1000W, UPPER
	1006-454801	SPIDER, LOWER (990/1000)
	1012-415400	ARM, 6", FEED
	1014-001002	AUTO LOADER, 6" AUTOMATION
	1015-051100	NUT, THETA
	1015-532600	BEARING, THETA V, GUIDE WHL
	1016-471500	MANIFOLD, PNEUMATIC
	1016-565100	SWITCH ACTUATOR PLATE
	1016-572000	CYLINDER, THETA
	1019-495200	PRINTER COVER, MODEL 1000WF
	1024-512100	FEB, CELL, LENS, PAIR
	1024-512700	MIRROR, DETECTOR, 2% TRANSMIT
	1024-514200	SLIDER, AIR BEARING 1000/1100
	1024-562200	FILTER, SHUTTER, FAB
	1024-586000	PLATES, STRIKER, RETICLE
	1025-588400C	SPIDER ASSY, FPI LOWER
	1025-588500	PLATE, DETENT FPI
	1026-516900	CYLINDER, RETICLE FINGER
	1026-517000	CAP, END, LOWER
	1026-517300	PLATE-Y, HOLDER
	1026-517400	PMT SHUTTER
	1026-519900	COVER, AIRPOT
	1026-549700	SCREW, THETA
	1026-549800	BRACKET, MOTOR MOUNTING
	1026-569500	SOLONOID, VALVE, 3 WAY, MOD, FAB, (B14DK1030)
	1026-580700	FINGER SHAFT, RETICLE
	1028-569400	SOLENOID
	1028-580300	TEST PLATE, ABSOLUTE POS
	1032-573600	MOTOR, CONVEYER STEPPER
	1032-573700	MOTOR, INDEXER STEPPER
	1047-700528	AIR BEARING SLIDER, ANGE
	1052-670300	GATE, 4"
	1052-680200	GATE, 5"
	1052-696000	O-RING IDLER
	1052-700574	AXEL AUTOMATION (.187x7.0" LG.)
	1053-623300	FOCUS CONTROLLER BOARD
	1054-603500	ELLIPSOIDAL MIRROR, 1000W
	1054-604400	MIRROR, COLD (1100)
	1054-605300	FILTER, UV ROUND (1100)
	1054-610000	WINDOW, BLAST, FUSED SILLICA
	1054-618000	X LASER COVER
	1054-679400	FAB, HOMOGENIZER, FIBER OPTICS
	1056-595400	ADJ, ROTATION, SCREW, LENS MOUNTING
	1056-595800	STEEL PLATE
	1056-596300	FINGER SHAFT, RETICLE FINGER
	1056-598400	PLATE, (2) X STAGE STOP
	1056-598500	DRIVE ROD, X
	1056-598900	DRIVE ROD X 8" (1100/1500)
	1056-599000	GUIDEWAY-X, 8", ANGE
	1056-656700	NUT, SPLIT
	1056-690700	SPACER, THETA STAGE
	1056-690800	PEDESTAL, FAB
	1064-700104	HOMOGENIZER, FIBER OPTICS (1500)
	1064-700105	LENS PLCX
	1064-700107	FILTER, UV, CUT OFF (UTS 1500)