Wafer Chuck Reworking and Manufacturing

The wafer chuck on your Stepper needs to be absolutely flat to function properly, but chuck damage occurs during PM's, maching malfunction and even during normal operation. These dings and gradual wear greatly affect focus quality on your wafers image fields and cause hot spots, which reduce yield and or device reliability.

Chucks wear gradually during machine operation from the scraping action between the wafers and the chuck during the bash or wafer pickup routine. Wear especially happens to the leading edge of the chuck where the wafer is pushed against the bash bearings. After prolonged usage and cleaning, the frosty strip used to load reticles, wears and gets scratched. This can affect reticle load accuracy by causing false peaks during reticle loads with resultant loss of alignment target quality. KS Equipment can rework your existing chucks, replacing the frosty strip as necessary and restoring flatness to OEM specification.

We can also manufacture new chucks to original specifications or build custom chucks to suit your special needs. Give us a call, and let us describe our low priced chuck reworking and manufacturing capabilities in detail. Your satisfaction is guaranteed.